MEMS and NEMS for sensor and energy applications
This research theme includes two projects:
1. **MEMS for Biological Detection**: This project focuses on the synthesis and fabrication of piezoelectric MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) sensors for the detection of viruses and the monitoring of biological processes.
Recent publications related to this project
2. **Development of Energy Harvesting MEMS Devices**: This project involves integrating epitaxial piezoelectric ZnO and ferroelectric SrMn8O16 micro and nanowires onto silicon substrates.
Recent publications related to this project
Our work encompasses the packaging and prototyping of devices, as well as materials engineering. This includes processing functional materials through nanostructuring, laser etching, microfabrication, packaging of devices, electrode deposition, and other related processes. The team possesses expertise in both prototyping and theoretical multiphysics characterization of electronic devices.