New sensor devices based on soft chemistry assisted nanostructured functional oxides on Si integrated systems

SENSiSOFT is the research project supported by the stock market. It aims to develop high performance micro and nano sensors for the measurement of mechanical parameters (mass, forces, pressure, etc.) from the use of soft chemistry methods such as sol-gel. The main advantage of this approach is to use thin layers based on epitaxial oxides on silicon instead of thinned and polished crystals used in current resonators.