We are very happy to share our latest video article describing how soft chemistry assists nanostructured On-chip piezoelectric quartz devices.
“This work presents a detailed protocol for the microfabrication of nanostructured α-quartz cantilever on a Silicon-On-Insulator (SOI) technology substrate starting from the epitaxial growth of quartz film with the dip coating method and then nanostructuration of the thin film via nanoimprint lithography.”
Thanks to super talented students Claire Jolly and David Sanchez! and of course to our engineers Dilek Cakiroglu and Ricardo Garcia